Ngawubona umbiko onjalo kudala: ososayensi baseJalimane, eJapane nakwamanye amazwe bachitha iminyaka engu-5 futhi bachitha cishe ama-yuan ayizigidi ezingu-10 ukuze benze ibhola elenziwe ngezinto ezihlanzekile ze-silicon-28. Leli bhola le-silicon elingu-1kg lidinga ukwenziwa kwe-Ultra-precision machining, ukugaywa nokupholishwa, ukulinganisa okunembayo (i-sphericity, ama-roughness nekhwalithi), kungathiwa ibhola eliyindilinga ukudlula zonke emhlabeni.
Ake sethule inqubo yokupholisha enembe kakhulu.
01 Umehluko phakathi kokugaya nokupholisha
Ukugaya: Ukusebenzisa izinhlayiya ezilimazayo eziboshwe noma ezicindezelwe ethuluzini lokugaya, indawo engaphezulu iqedwa ukunyakaza okuhlobene kwethuluzi lokugaya kanye nomsebenzi ngaphansi kwengcindezi ethile. Ukugaya kungasetshenziswa ukucubungula izinto ezihlukahlukene zensimbi nezingezona ezensimbi. Izimo ezicutshunguliwe zangaphezulu zihlanganisa indiza, indawo yangaphakathi nengaphandle eyisilinda kanye ne-conical, indawo eyindilinga eyi-convex ne-concave, imicu, indawo yamazinyo namanye amaphrofayili. Ukunemba kokucubungula kungafinyelela ku-IT5~IT1, futhi ukuhwaqeka kwendawo kungafinyelela ku-Ra0.63~0.01μm.
I-Polishing: Indlela yokucubungula eyehlisa ubulukhuni obungaphezulu bocezu lokusebenza ngomshini, ngamakhemikhali noma ngesenzo se-electrochemical ukuze kutholwe indawo ekhanyayo nebushelelezi.
Umehluko omkhulu phakathi kwakho kokubili ukuthi ukuqedwa okungaphezulu okutholwe ngokupholishwa kuphakeme kunokugaya, futhi izindlela zamakhemikhali noma ze-electrochemical zingasetshenziswa, kuyilapho ukugaya ngokuyisisekelo kusebenzisa izindlela zomshini kuphela, futhi usayizi wokusanhlamvu ohubhukayo osetshenziswayo umaholoholo kunalowo osetshenziselwa ukugaya. ukupholisha. Okusho ukuthi, ubukhulu bezinhlayiyana bukhulu.
02 Ubuchwepheshe bokupholisha obunembe kakhulu
I-Ultra-precision polishing ingumphefumulo wemboni yesimanje ye-elekthronikhi
Umgomo wobuchwepheshe bokucwebezelisa okunembe kakhulu embonini yesimanje ye-elekthronikhi akukhona nje ukucaba izinto ezihlukene, kodwa futhi nokuthambisa izinto ezinezingqimba eziningi, ukuze ama-silicon wafers angamamilimitha ambalwa isikwele akwazi ukwakha amashumi ezinkulungwane ku-VLSI eyakhiwe izigidi ze ama-transistors. Ngokwesibonelo, i-computer eqanjwe abantu isishintshile isuka emashumini amathani yaya emakhulwini amagremu namuhla, okungenakwenzeka ngaphandle kokupholisha okunembe kakhulu.
Uma sithatha ukukhiqizwa kwe-wafer njengesibonelo, ukupholishwa kuyisinyathelo sokugcina sayo yonke inqubo, inhloso ukuthuthukisa amaphutha amancane ashiywe inqubo yangaphambilini yokucubungula ama-wafer ukuze kutholwe ukufana okuhle kakhulu. Izinga lanamuhla lemboni yolwazi lwe-optoelectronic lidinga izidingo eziningi zokuhambisana okunembe kakhudlwana kwezinto zokwakha ze-optoelectronic substrate ezifana nesafire ne-silicon yekristalu eyodwa, ezifinyelele izinga le-nanometer. Lokhu kusho ukuthi inqubo yokupholisha nayo ingene ezingeni lokunemba kakhulu lama-nanometer.
Yeka ukuthi ibaluleke kangakanani inqubo yokupholishwa okunembe kakhulu ekukhiqizeni kwesimanje, izinkambu zayo zokufaka isicelo zingachaza ngokuqondile inkinga, okuhlanganisa ukukhiqizwa kwesekethe ehlanganisiwe, imishini yezokwelapha, izingxenye zezimoto, izesekeli zedijithali, isikhunta esinembayo kanye ne-aerospace.
Ubuchwepheshe bokupholisha obuphezulu buphethwe amazwe ambalwa njenge-United States ne-Japan
Idivayisi eyinhloko yomshini wokupholisha "idiski yokugaya". I-Ultra-precision polishing inezidingo ezicishe ziqine ekwakhiweni kwezinto ezibonakalayo kanye nezidingo zobuchwepheshe zediski yokugaya emshinini wokupholisha. Lolu hlobo lwediski yensimbi eyenziwe ngezinto ezikhethekile akumele luhlangabezane nokunemba kwezinga le-nano lokusebenza okuzenzakalelayo, kodwa futhi lube ne-coefficient enembile yokwandisa okushisayo.
Lapho umshini wokupholisha usebenza ngesivinini esikhulu, uma ukwanda okushisayo kubangela ukuguqulwa kokushisa kwe-disc yokugaya, i-flatness kanye ne-parallelism ye-substrate ayikwazi ukuqinisekiswa. Futhi lolu hlobo lwephutha lokuguquguquka kwe-thermal elingakwazi ukuvunyelwa ukuthi lenzeke akuwona amamilimitha ambalwa noma ama-microns ambalwa, kodwa ama-nanometers ambalwa.
Njengamanje, izinqubo zokupholisha eziphezulu zamazwe ngamazwe ezifana ne-United States ne-Japan sezingakwazi kakade ukuhlangabezana nezimfuneko zokupholisha ezinembayo zezinto ezingavuthiwe ze-substrate engu-60-intshi (ezinosayizi omkhulu). Ngokusekelwe kulokhu, bafunde ubuchwepheshe obuyisisekelo bezinqubo zokupholisha ezinembayo futhi babambe ngokuqinile isinyathelo emakethe yomhlaba. . Eqinisweni, ukwenza kahle lobu buchwepheshe kulawula ukuthuthukiswa komkhakha wokukhiqiza izinto zikagesi ngezinga elikhulu.
Njengoba ngibhekene nokuvinjwa okuqinile kwezobuchwepheshe, emkhakheni wokupholisha okunembe kakhulu, izwe lami lingakwazi ukuzicwaninga njengamanje.
Lingakanani izinga lobuchwepheshe bokupholisha obunembe kakhulu baseChina?
Eqinisweni, emkhakheni we-ultra-precision polishing, i-China ayinazo izimpumelelo.
Ngo-2011, i-"Cerium Oxide Microsphere Particle Size Standard Material and Its Preparation Technology" eyakhiwe ithimba likaDkt. Wang Qi ovela eSikhungweni Sikazwelonke SeSayensi Ye-Nanoscale ye-Chinese Academy of Sciences iwine umklomelo wokuqala we-China Petroleum and Chemical Industry. I-Federation's Technology Invention Award, kanye nezinto ezijwayelekile zosayizi wezinhlayiyana zesikali se-nanoscale Itholwe ilayisensi kazwelonke yethuluzi lokulinganisa kanye nesitifiketi sikazwelonke sezinga eliphezulu esijwayelekile. Umphumela wokuhlolwa kokukhiqizwa kokupholisha ukunemba kwe-ultra-precision wento entsha ye-cerium oxide udlule izinto zendabuko zakwamanye amazwe ngokuwa okukodwa, okugcwalisa igebe kulo mkhakha.
Kodwa uDkt. Wang Qi uthe: “Lokhu akusho ukuthi sesikhuphukele esicongweni salo mkhakha. Kuyo yonke inqubo, kunoketshezi lokupholisha kuphela kodwa awekho umshini wokupholisha onembe kakhulu. Kakhulu, sidayisa izinto zokwakha kuphela.”
Ngo-2019, ithimba labacwaningi likaSolwazi Yuan Julong wase-Zhejiang University of Technology lakha ubuchwepheshe bokucubungula amakhemikhali abrasive abrasive abrasive mechanical processing. Uchungechunge lwemishini yokupholisha ethuthukisiwe lukhiqizwe ngobuningi yi-Yuhuan CNC Machine Tool Co., Ltd., futhi luhlonzwe njengengilazi ye-iPhone4 ne-iPad3 yi-Apple. Okuwukuphela kwemishini yokupholisha enembayo emhlabeni yokupholisha i-backplane yephaneli ne-aluminium alloy, imishini yokupholisha engaphezu kuka-1,700 isetshenziselwa ukukhiqizwa ngobuningi kwamapuleti engilazi e-iPhone ne-iPad.
I-charm yokucubungula ngomshini ilele kulokhu. Ukuze uphishekele isabelo semakethe kanye nenzuzo, kufanele uzame konke okusemandleni akho ukuze uhlangane nabanye, futhi umholi wezobuchwepheshe uzohlala ethuthuka futhi ethuthuka, ukuze acwengisiswe kakhulu, aqhudelane njalo futhi abambe iqhaza, futhi akhuthaze intuthuko enkulu ubuchwepheshe babantu.
Isikhathi sokuthumela: Mar-08-2023
